Acoustics on small scales
نویسندگان
چکیده
Abstract We present a modelling strategy based on the finite element method to describe flexible, piezoelectric structures surrounded by compressible fluid, including viscosity. Non-conforming interfaces Mortar are used couple different physical domains. Finally, we an application example of piezoelectrically actuated MEMS structure illustrate modeling procedure and impact viscous effects.
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ژورنال
عنوان ژورنال: Elektrotechnik Und Informationstechnik
سال: 2021
ISSN: ['1613-7620', '0932-383X']
DOI: https://doi.org/10.1007/s00502-021-00875-4